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OBERFLÄCHENFORMMESSVORRICHTUNG, OBERFLÄCHENFORMMESSMETHODE UND OBERFLÄCHENFORMMESSPROGRAMM
| Patentnummer: | EP3346231B1 |
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| IPC Hauptklasse: | G01B21/20 |
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| Anmelder: | NIKON CORP (1)
株式会社ニコン (1) |
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| Erfinder: | MIYAWAKI Takashi (1) |
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| Anmeldung: | 31.08.16 |
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| Patenterteilung: | 09.08.23 |
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| Einspruch bis: | 09.05.24 |
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Abstract / Hauptanspruch |
| For a contactless three-dimensional shape measurement device using probe light, it has been required that first shape data of a measurement object is known in order to preset the locus of operation of a measurement head such that the probe light is incident orthogonally on a measurement surface as possible. A surface shape measurement apparatus to measure a surface shape of a measurement object, including: a distance measurement device which measures a distance to a measurement point on a surface of the measurement object; an angle measurement device which measures inclination of the surface at the measurement point; a first calculation part which calculates reference shape data of the measurement object based on the distance measured by the distance measurement device; and a second calculation part which calculates detailed shape data of the measurement object based on the inclination measured by the angle measurement device and the reference shape data. |
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