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HOCHBELASTBARE DEHNUNGSMESSER UND VERFAHREN ZUR HERSTELLUNG DAVON

Patentnummer:EP3542138B1
IPC Hauptklasse:G01B7/16
Anmelder:EZMEMS LTD (1)
Erfinder:MOLINAZZI NICOLA (1)
SHMILOVICH TSVI (1)
Anmeldung:16.11.17
Patenterteilung:09.08.23
Einspruch bis:09.05.24

Abstract / Hauptanspruch
Strain gauge structures having high and accurately adjustable electrical resistances and improved heat dispersion properties, and fabrication techniques for the same, are disclosed. Strain gauge of some embodiments comprises a substrate, at least one transducing element configured to change at least one electrical property thereof in response to deformations in the substrate, and one or more trimming grids electrically connected to the at least one transducing element and configured and operable to accurately set electrical resistance of the strain gauge element by setting length of a conduction path thereof, and at least one heat sink element thermally coupled to at least one of the at least one transducing element and the one or more trimming grids and configured to dissipate heat developed therein.


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