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Patentnummer:EP3633065B1
IPC Hauptklasse:G01B7/06
Anmelder:BOE TECHNOLOGY GROUP CO.,LTD. (3)
BOE TECHNOLOGY GROUP CO LTD (3)
BOE TECHNOLOGY GROUP CO.,LTD. (3)
HEFEI XINSHENG OPTOELECTRONIC TECHNOLOGY CO LTD (1)
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO LTD (1)
HEFEI XINSHENG OPTOELECTRONICS TECHNOLOGY CO.,LTD. (1)
Erfinder:GUO SHUPENG (1)
HU CHANGQI (1)
Anmeldung:15.12.17
Patenterteilung:16.08.23
Einspruch bis:16.05.24

Abstract / Hauptanspruch
An evaporation apparatus is disclosed. The evaporation apparatus includes an operation platform (900); an evaporation source (110) on the operation platform (900); an inner plate (120) on at least one side of the evaporation source (110), the inner plate (120) being fixedly connected to the evaporation source (110); and an outer plate (130) on a side of the inner plate (120) away from the evaporation source (110), the outer plate (130) being adjacent to the inner plate (120). The inner plate (120) can be configured to detect an evaporation rate of the evaporation source, and the outer plate (130) can adjust an evaporation range.


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