| Defect judging unit (370) for a measuring probe (300) including: a stylus (336) having a contact part (362) to be in contact with an object (W) to be measured; four detection elements (325) capable of detecting a movement of the contact part (362); and a signal processing part (366) configured to process generated signals (Sg) obtained from outputs of the four detection elements (325) to output touch signals (Str). The defect judging unit includes a defect judging part (372) configured to compare four judged signals (Sh) corresponding to the generated signals (Sg) with predetermined thresholds (St) when the object (W) to be measured and the contact part (362) are out of contact with each other and judge that a defect exists if any of the judged signals (Sh) is greater than the predetermined threshold (St), and a judged result output part (390) configured to output a judged result of the defect judging part (372). According to this configuration, the defect judging unit of the measuring probe and the defect judging method thereof capable of ensuring measurement reliability with a simple configuration are provided. |
