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INTERFEROMETRISCHE TASTSONDE
| Patentnummer: | EP3714230B1 |
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| IPC Hauptklasse: | G01B11/00 |
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| Anmelder: | Quality Vision International, Inc. (1)
QUALITY VISION INT INC (1)
QUALITY VISION INTERNATIONAL INC. (1)
Quality Vision International, Inc. (1) |
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| Erfinder: | RAHO GUGLIELMO (1) |
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| Anmeldung: | 11.12.17 |
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| Patenterteilung: | 16.08.23 |
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| Einspruch bis: | 16.05.24 |
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Abstract / Hauptanspruch |
| A touch probe for sensing the position of a surface, having a housing and a moving assembly supported within the housing and including a flexible reflective element, a spacer element, and a semitransparent element, wherein a reflective surface of the flexible reflective element and a surface of the semitransparent element opposing the reflective surface are separated by the spacer element, and a stylus connected to the flexible reflective element. The moving assembly and stylus are configured such that movement of the stylus responsive to a force on the stylus causes the flexible reflective element to flex and change distances between points on the reflective surface of the flexible reflective element and on the opposing surface of the semitransparent element. A coherent light source provides coherent light incident upon the semitransparent element and directed through the semitransparent element towards the reflective surface of the flexible reflective element, such that interference fringes are created dependent upon separation distances between the reflective surface of the reflective element and the opposing surface of the semitransparent element. A detector senses changes in the interference fringes patterns in response to flexing of the flexible element. |
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