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OPTISCHER STIFT MIT CHROMATISCHEM PUNKTSENSOR MIT EINSTELLBAREM ARBEITSBEREICH UND EINSTELLBAREM STAND-OFF ABSTAND UND VERFAHREN ZUR EINSTELLUNG DES ARBEITSBEREICHES UND DES ABSTANDES EINES CHROMATISCHEN PUNKTSENSORS

Patentnummer:EP3816575B1
IPC Hauptklasse:G01B11/24
Anmelder:MITUTOYO CORP (5)
株式会社三丰 (3)
Erfinder:NAGORNYKH PAVEL IVANOVICH (1)
PAVEL IVANOVICH NAGORNYKH (1)
Anmeldung:20.10.20
Patenterteilung:09.08.23
Einspruch bis:09.05.24

Abstract / Hauptanspruch
A chromatic point sensor (CPS) optical pen 120 provides a signal usable to measure a distance MD to a surface 190, and includes an axial chromatic aberration portion 150 arranged to receive source radiation from an aperture 195, output it toward the surface 190 as a focused measurement beam 196 having axial chromatic dispersion, receive reflected radiation from the surface 190 and focus it proximate to the aperture 195. The axial chromatic aberration portion 150 includes a first axially dispersive focusing element 150A that receives the source radiation and focuses it at a first focal region FR 1, a second axially dispersive focusing element 150B that receives the radiation from the first focal region FR 1 and focuses it at a second focal region FR 2, and a third axially dispersive focusing element 150C that receives the radiation from the second focal region FR 2 and outputs the measurement beam 196. Lengths between the first 150A, second 150B and third axially dispersive focusing elements 150C are adjustable (i.e., resulting in an adjustable range).


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