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VERFAHREN ZUR PRÜFUNG EINES ZIELOBJEKTS, STEUERSYSTEM UND PRÜFSYSTEM
| Patentnummer: | EP3841374B1 |
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| IPC Hauptklasse: | G01B11/06 |
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| Anmelder: | ABB Schweiz AG (3)
5400 Baden, CH, 100070081 |
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| Erfinder: | FRANK ANDREAS (1)
MAAS DERAN (1)
VAN MECHELEN JACOBUS LODEVICUS MARTINUS (1) |
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| Anmeldung: | 23.08.18 |
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| Patenterteilung: | 02.08.23 |
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| Einspruch bis: | 02.05.24 |
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Abstract / Hauptanspruch |
| A method for inspection of a target object (38), the method comprising irradiating a reference surface (66) having a non-flat reference profile (68) with radiation (58); determining reference response data based on detected radiation (58) having interacted with the reference surface (66); irradiating a target object (38) with radiation (58), the target object (38) comprising a target surface (70) having a non-flat target profile (72) corresponding to the reference profile (68); determining inspection response data based on detected radiation (58) having interacted with the target object (38); and determining at least one parameter of the target object (38) based on the reference response data and the inspection response data. An alternative method; a control system (18) for controlling an emitter system (40) and a detector system (42); and an inspection system (14) comprising a control system (18), an emitter system (40) and a detector system (42), are also provided. |
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