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LASERSENSORMODUL FÜR SELBSTMISCHENDE INTERFEROMETRIE

Patentnummer:EP3968475B1
IPC Hauptklasse:G01B11/16
Anmelder:TONFAST PHOTOELECTRIC DEVICE LTD COMPANY (1)
TRUMPF PHOTONIC COMPONENTS GMBH (1)
Erfinder:DRAGOT J E RU ME (1)
DRAGT JEROEN (1)
HELLMIG JOACHIM WILHELM (1)
HELLMIG JOCHEN (1)
HOEVEN PIETER (1)
HUFEN PETER (1)
MACFANDE AUDREY (1)
SPRUIT HANS (1)
SPRUIT HEINER (1)
VAN DER LEE ALEXANDER MARC (1)
Anmeldung:15.09.20
Patenterteilung:23.08.23
Einspruch bis:23.05.24

Abstract / Hauptanspruch
The present invention relates to a laser sensor module (150). The laser sensor module (150) comprises a first laser source (152) configured to emit modulated laser light, a circuitry (159) configured to drive the first laser source (152) with a first modulated driving current to cause the first laser source (152) to emit modulated laser light, a detector (156) configured to detect said modulated laser light which induces a photocurrent with variations resulting from the modulation of said modulated laser light, and a second laser source (154) configured to emit modulated light. The circuitry (159) is configured to drive the second laser source (154) with a second modulated driving current to cause the second laser source (154) to emit modulated light. The detector (156) is configured to detect said modulated light, wherein the circuitry (159) is configured to adapt the amplitude of the second modulated driving current to induce a contribution to the photocurrent which compensates for the variations of the photocurrent induced by the laser light of the first laser source (152). A device comprising the laser sensor module (150) and a method for compensating for the variations of a detected photocurrent of a detector (156) of the laser sensor module (150) and a corresponding computer program are further described.


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