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FORMMESSVORRICHTUNG, FORMMESSVERFAHREN, UND STRUKTURHERSTELLUNGSVERFAHREN
| Patentnummer: | EP2634530B1 |
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| IPC Hauptklasse: | G01B21/20 |
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| Anmelder: | NIKON CORP (1)
NIPPON KOGAKU KK (1)
株式会社ニコン (1)
株式会社尼康 (1)
가부시키가이샤 니콘 (1) |
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| Erfinder: | KANTO KENTA (2) |
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| Anmeldung: | 27.10.11 |
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| Patenterteilung: | 04.05.22 |
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| Einspruch bis: | 04.02.23 |
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Abstract / Hauptanspruch |
| To simplify setting processing (teaching processing) of setting a measurement area to be measured with respect to an object to be inspected. A form measuring apparatus is provided with: a detecting section (20) which performs detection of a surface form of a surface of an object having a three-dimensional form; and an area-setting section (58) which sets, as a measurement area, an adjacent area adjacent to a predetermined designated area, based on a form measurement data of the form detected in the predetermined designated area. |
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