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FORMMESSVORRICHTUNG, FORMMESSVERFAHREN, UND STRUKTURHERSTELLUNGSVERFAHREN

Patentnummer:EP2634530B1
IPC Hauptklasse:G01B21/20
Anmelder:NIKON CORP (1)
NIPPON KOGAKU KK (1)
株式会社ニコン (1)
株式会社尼康 (1)
가부시키가이샤 니콘 (1)
Erfinder:KANTO KENTA (2)
Anmeldung:27.10.11
Patenterteilung:04.05.22
Einspruch bis:04.02.23

Abstract / Hauptanspruch
To simplify setting processing (teaching processing) of setting a measurement area to be measured with respect to an object to be inspected. A form measuring apparatus is provided with: a detecting section (20) which performs detection of a surface form of a surface of an object having a three-dimensional form; and an area-setting section (58) which sets, as a measurement area, an adjacent area adjacent to a predetermined designated area, based on a form measurement data of the form detected in the predetermined designated area.


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