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VERFAHREN ZUR HERSTELLUNG EINES WELLENLEITERS ZUM FÜHREN EINER ELEKTROMAGNETISCHEN WELLE

Patentnummer:EP3663818B1
IPC Hauptklasse:G01D5/26
Anmelder:IMEC VZW (1)
KATHOLIEKE UNIV LEUVEN KU LEUVEN RESEARCH & DEVELOPMENT (1)
UNIV LEUVEN KATH (1)
Erfinder:HASAN MD MAHMUD UL (1)
MAHMUD UL HASAN MD (1)
ROCHUS VERONIQUE (1)
SEVERI SIMONE (1)
WESTERVELD WOUTER JAN (1)
Anmeldung:04.12.18
Patenterteilung:11.05.22
Einspruch bis:11.02.23

Abstract / Hauptanspruch
A method for manufacturing of a waveguide (100) for guiding an electro-magnetic wave comprising: forming a first waveguide layer (502), a sacrificial layer (504) and a protection layer (506) on a first wafer (500), patterning to define a pattern of a first waveguide part (102) and a supporting structure (112) in the first waveguide layer (502); exposing the sacrificial layer (504) on the first waveguide part (102) while the protection layer (506) still covers the sacrificial layer (504) on the supporting structure (112); removing the sacrificial layer (504) on the first waveguide part (102); removing the protection layer (506); bonding a second wafer (510) to the sacrificial layer (504) of the first wafer (500) such that a second waveguide part (104) is supported by the supporting structure (112) and a gap (106) corresponding to the thickness of the sacrificial layer (504) is formed between the first and second waveguide parts.


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