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VERFAHREN UND VORRICHTUNG ZUR KURZKOHÄRENTEN REFLEKTOMETRIE UNTER VERWENDUNG VON ZEIT-FREQUENZ-ERFASSUNG

Patentnummer:EP3601946B1
IPC Hauptklasse:G01B11/00
Anmelder:FOGALE NANOTECH (2)
Erfinder:COURTEVILLE ALAIN (2)
GODAVARTHI CHARANKUMAR (1)
NEEL CHRISTIAN (1)
Anmeldung:12.03.18
Patenterteilung:04.05.22
Einspruch bis:04.02.23

Abstract / Hauptanspruch
A low-coherence interferometer apparatus for determining information on interfaces of an object including: a polychromatic light source; an optical system generating a measurement optical beam and a reference optical beam; a delay line introducing a variable optical delay between the optical beams; detection optics combining the beams, and producing a spectral signal representative of an optical-power spectral density of the resulting interference signal; a control and processing module acquiring a plurality of spectral signals for a plurality of optical delays, determining, for each spectral signal, optical retardation information between interfering beams within a spectral measurement range, analyse the variation in the retardations, and assign the optical retardation determined on the basis of the different spectral signals to interface curves, corresponding to straight lines with positive, negative, zero or almost-zero gradient, depending on the respective optical delay of the acquisition of the spectral signals, and to deduce information of the object.


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