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MONTAGEVORRICHTUNG UND BILDVERARBEITUNGSVERFAHREN

Patentnummer:EP3407696B1
IPC Hauptklasse:G01B11/00
Anmelder:FUJI CORP (1)
FUJI MACHINE MFG (1)
FUJL CORP (1)
株式会社FUJI (1)
株式会社富士 (1)
Erfinder:AMANO MASAFUMI (1)
KAMIO RYOHEI (1)
KOTANI KAZUYA (1)
YAMAKAGE Yusuke (1)
Anmeldung:19.01.16
Patenterteilung:17.11.21
Einspruch bis:17.08.22

Abstract / Hauptanspruch
A mounting device sets a processing region for super-resolution processing based on an approximate position of a main body portion of a component 60 included in a mark image for use in obtaining a position of a fiducial mark and then performs super-resolution processing. Thus, the processing region for super-resolution processing can be appropriately set and prevented from becoming larger than necessary with respect to the main body portion of the component 60. Further, the processing region for super-resolution processing is determined using the mark image captured under an imaging condition different from that for the component image for use in super-resolution processing. Thus, the processing region can be appropriately set while the component image is kept under an imaging condition suitable for super-resolution processing. Therefore, the processing region for performing super-resolution processing can be set more appropriately, and the super-resolution processing can be efficiently performed.


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