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FORMMESSVERFAHREN UND FORMMESSVORRICHTUNGEN

Patentnummer:EP3425326B1
IPC Hauptklasse:G01B11/24
Anmelder:THE UNIV OF ELECTRO-COMMUNICATIONS (1)
UNIV ELECTRO COMMUNICATIONS (1)
国立大学法人電気通信大学 (1)
Erfinder:MINOSHIMA KAORU (1)
Anmeldung:21.12.16
Patenterteilung:10.11.21
Einspruch bis:10.08.22

Abstract / Hauptanspruch
A shape measurement method of the present invention includes: a step of irradiating a measurement object with an optical pulse train in which a plurality of optical pulses that have predetermined frequency distributions on a time axis are disposed chronologically in numerical order; and a step of measuring an optical shape of the measurement object in accordance with a correspondent relation between numbers of the optical pulses of a plurality of detection target optical pulse trains after the emitted optical pulses act on the measurement object and a correspondent relation between the frequency distributions in the optical pulses.


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