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POSITIONIERUNGSARM UND VERFAHREN ZUR PLATZIERUNG EINES ABTASTKOPFES AUF EINE STÜTZFLÄCHE

Patentnummer:EP3322992B1
IPC Hauptklasse:G01B5/00
Anmelder:NEDERLANDSE ORGANISATIE VOOR TOEGEPAST- NATUURWETENSCHAPPELIJK ONDERZOEK TNO (1)
NEDERLANDSE ORGANISATIE VOOR TOEGEPAST-NATUURWETENSCHAPPELIJK ONDERZOEK TNO (1)
TNO (1)
ネーデルランドセ・オルガニサティ・フォール・トゥーヘパスト-ナトゥールウェテンスハッペライク・オンデルズーク・テーエヌオー (1)
荷兰应用自然科学研究组织TNO (1)
Erfinder:CROWCOMBE WILLIAM EDWARD (1)
SADEGHIAN MARNANI HAMED (1)
WINTERS JASPER (1)
Anmeldung:15.07.15
Patenterteilung:03.11.21
Einspruch bis:03.08.22

Abstract / Hauptanspruch
The invention is directed at a positioning arm for positioning of a scan head of a surface scanning measurement device – such as a scanning probe microscopy device – relative to a surface. The positioning arm comprises a base at a first end thereof for mounting the arm with the base to a static reference structure. The positioning arm further comprises a first and a second arm member extending from the base, the second arm member extending parallel to the first arm member. The arm comprises a bridge member at a second end thereof, connecting the first and the second arm members. The first and the second arm member are respectively connected to each one of said base and said bridge member by means of a hingeable connection. The positioning arm further comprises an actuator for inducing a relative displacement between the first and the second arm member in a longitudinal direction of said first and second arm member for swinging the second end of the positioning arm in a direction transverse to the lateral displacement. The bridge member comprises a support for supporting the scan head.


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