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VORRICHTUNG ZUR MESSUNG DREIDIMENSIONALER FORMEN, VERFAHREN ZUR MESSUNG DREIDIMENSIONALER FORMEN UND PROGRAMM

Patentnummer:EP3594618B1
IPC Hauptklasse:G01B11/25
Anmelder:OMRON TATEISI ELECTRONICS CO (6)
欧姆龙株式会社 (3)
오므론 가부시키가이샤 (2)
Erfinder:HAYASHI KENNOSUKE (1)
OHNISHI YASUHIRO (2)
ONISHI YASUHIRO (2)
SUWA MASAKI (2)
Anmeldung:28.11.17
Patenterteilung:17.11.21
Einspruch bis:17.08.22

Abstract / Hauptanspruch
A control device assumes that observation light observed by an imaging device is composite light of primary reflection light and secondary reflection light. The control device acquires three or more samples of a brightness amplitude value of the observation light, calculates a phase error caused by the secondary reflection light using these samples, calculates a corrected phase value by correcting a phase value of the observation light using the phase error, and calculates a three-dimensional position of the measurement point on the measurement object based on the corrected phase value.


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