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OPTISCHE VERZÖGERUNGSLEITUNG, NIEDRIGKOHÄRENTES INTERFEROMETER ZUR IMPLEMENTIERUNG DIESER LEITUNG, MESSVERFAHREN UND VORRICHTUNG ZUR IMPLEMENTIERUNG DES INTERFEROMETERS

Patentnummer:EP3580521B1
IPC Hauptklasse:G01B11/06
Anmelder:FOGALE NANOTECH (1)
FOGALE 纳米技术公司 (1)
Erfinder:COURTEVILLE ALAIN (1)
Anmeldung:02.02.18
Patenterteilung:24.11.21
Einspruch bis:24.08.22

Abstract / Hauptanspruch
An optical delay line (LR) intended to be implemented in an interferometer, comprising a rotating polygon (29). This polygon (29) is arranged to modulate the respective optical paths of first and second light beams (Li1, Li2), which are issued from the same what is called measurement beam, and which are directed through the polygon (29) toward a first and a second reflector (21, 22), respectively, so as to generate an optical delay by way of the difference between the optical paths of these first and second beams (Li1, Li2). Implementation in an optical measuring device integrating a low-coherence interferometer.


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