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BELICHTUNGSVORRICHTUNG, BELICHTUNGSVERFAHREN UND HERSTELLUNGSVERFAHREN

Patentnummer:EP3723111B1
IPC Hauptklasse:G01B11/00
Anmelder:NIKON CORP (0)
NIPPON KOGAKU KK (0)
株式会社ニコン (0)
株式会社尼康 (0)
株式會社尼康 (0)
가부시키가이샤 니콘 (0)
Erfinder:SHIBAZAKI YUICHI (0)
YUICHI SHIBAZAKI (0)
Anmeldung:02.10.13
Patenterteilung:08.09.21
Einspruch bis:08.06.22

Abstract / Hauptanspruch
In corner sections of a first quadrant, a second quadrant, a third quadrant and a fourth quadrant whose origin point is a center of an upper surface of a stage (WST1), three each of two-dimensional heads (60i, 60ia, 60ib(i=1 to 4)) are provided. Stage (WST1) is driven, while measuring a position of stage (WST1) using three heads (60i) that face a two-dimensional grating (RG) of a scale plate (21) provided above the stage (WST1) from four heads (60i(i=1, 2, 3, 4)), and during the driving, difference data of measurement values in a measurement direction are taken in for two remaining heads (60ia, 60ib) of a head group (61i) having the three each of heads to which the three heads (60i) belong, respectively, and using the difference data, grid errors in the measurement direction of two-dimensional grating (RG) are calibrated.


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