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VERFAHREN UND SYSTEM ZUR KOMPENSATION VON GENAUIGKEITSFEHLERN EINES HEXAPODS

Patentnummer:EP3362765B1
IPC Hauptklasse:G01B21/04
Anmelder:MICRO CONTROLE SPECTRA PHYSICS (2)
MICRO-CONTROLE - SPECTRA-PHYSICS (1)
MICRO-CONTROLE SPECTRA-PHYSICS (1)
マイクロ-コントロール - スペクトラ-フィジクス エスアエス (1)
微观调控物理光谱公司 (1)
Erfinder:DUQUENOY FRANCK (1)
DURAND ERIC (1)
Anmeldung:05.10.16
Patenterteilung:04.08.21
Einspruch bis:04.05.22

Abstract / Hauptanspruch
A method for compensating for accuracy errors of a hexapod is disclosed, said hexapod comprising a base, an actuation assembly having six linear translation actuators, a control unit, and a movable carriage comprising a platform connected to the base by means of the actuation assembly. The method includes a measurement step for determining geometry and positioning errors on the hexapod, the measurement step including sub-steps for determining positioning errors of the pivot centers on the carriage and on the base, for determining length errors of the actuators and for measuring positioning errors of the actuators along the path thereof, the compensation method also including a step for calculating, from measurements taken, error compensation values and a step for applying said error compensation values to the control unit of the hexapod, during subsequent use of said hexapod.


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