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ADAPTIVE SINGLE-SHOT-METROLOGIE VON ROTATIONSVARIANTEN OPTISCHEN OBERFLÄCHEN UNTER VERWENDUNG EINES RÄUMLICHEN LICHTMODULATORS

Patentnummer:EP3688406B1
IPC Hauptklasse:G01B11/24
Anmelder:UNIV ROCHESTER (1)
Erfinder:CHAUDHURI ROMITA (1)
ROLLAND-THOMPSON JANNICK (1)
Anmeldung:23.10.18
Patenterteilung:11.08.21
Einspruch bis:11.05.22

Abstract / Hauptanspruch
Single-shot, adaptive metrology of rotationally variant optical surfaces, such as toroids, off-axis conies and freeform surfaces. An adaptive interferometric null test uses a high definition liquid crystal phase-only spatial light modulator (SLM) as the reconfigurable null element, on which a simulated nulling phase function is encoded, based on the specifications of the surface under test to generate a null interferogram. The power component of the surface sag is nulled by system design, not the SLM, enabling the SLM to fully compensate the residual departure without the need to tilt the optic or use a custom Offner-null. By wrapping the phase function at multiples of 2*pi radian, the upper limit in sag of the optic under test is theoretically removed.


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