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Verschiebungssensor und Verschiebungsmessverfahren

Patentnummer:EP2720013B1
IPC Hauptklasse:G01B11/02
Anmelder:YOKOGAWA ELECTRIC CORP (2)
横河电机株式会社 (2)
横河電機株式会社 (2)
Erfinder:ATSUSHI TSUJII (1)
CHIDA NAOMICHI (2)
KAZUFUMI NISHIDA (1)
NAOMICHI CHIDA (1)
NISHIDA KAZUFUMI (2)
SENDA NAOMICHI (2)
TSUJII ATSUSHI (1)
Anmeldung:02.10.13
Patenterteilung:18.08.21
Einspruch bis:18.05.22

Abstract / Hauptanspruch
A displacement sensor includes a light source unit configured to apply light with different plural wavelengths in a direction oblique to a measurement region of a planar measured object, a spectroscope configured to measure spectral distribution of light reflected by the measurement region, a feature amount extracting module configured to extract a feature amount of the spectral distribution, and a displacement calculating module configured to calculate displacement of the measurement region based on the extracted feature amount and a relation between displacement and a feature amount acquired previously.


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