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Original-Dokument Europäisches Patentamt

MESSANORDNUNG UND MESSVERFAHREN | DISPOSITIF DE MESURE ET PROCÉDÉ DE MESURE | MEASUREMENT DEVICE AND MEASUREMENT METHOD

Patentnummer:	EP2093536B1
IPC Hauptklasse:	G01B001124
Anmelder:	NIKON CORPORATION (0) 12-1, Yurakucho 1-chome, Chiyoda-ku; Tokyo 100-8331, JP
Erfinder:
Anmeldung:	07.12.07
Offenlegung:	13.12.06
Patenterteilung:	20.01.21
Abstract / Hauptanspruch
A measuring device according to the present invention includes a light-sending part sending light in a first direction which is a depth direction of a hollow shape, a conversion part converting a direction of the light into a circumference direction approximately orthogonal to the first direction, a detection part detecting light reflected inside a measuring object, the direction of which is converted by the conversion part, and a shape measurement part measuring an inside shape of the measuring object by obtaining a shift from a reference position according to a detection result of the detection part. Thereby, it is possible to obtain the hollow shape of an object at one time without a need of rotating the object or a light source, and to carry out a highly accurate measurement using a simple device.