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Europäisches Patentamt

SENSORKOPF | TÊTE DE CAPTEUR | SENSOR HEAD

Patentnummer:EP3546883B1
IPC Hauptklasse:G01B001106
Anmelder:OMRON CORPORATION (0)
Kyoto, JP
Erfinder:Okuda, Takahiro (0)
Kyoto, JP
Anmeldung:12.02.19
Offenlegung:15.03.18
Patenterteilung:21.10.20

Abstract / Hauptanspruch
Provided is a sensor head capable of reduction in size while securing measurement accuracy. A sensor head (100) includes a first case section (2) and a second case section (3) each having a substantially cylindrical shape and an end portion of which is open, and a third case section (13) configured to connect the first case section (2) and the second case section (3), a diffraction lens (5) is disposed in the first case section (2), an objective lens (7) is disposed in the second case section (3), and a mirror member (135) is disposed in the third case section (13) and configured to bend light entering the diffraction lens (5) side toward the objective lens (7) side.



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