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Determining a position of a movable part of a coordinate measuring machine

Patentnummer:US10775148B2
IPC Hauptklasse:G01B0005008
Anmelder:Carl Zeiss AG (0)
Carl Zeiss Strasse 22, 73447 Oberkochen, DE
Erfinder:Bernhardt, Ralf (0)
73432, Aalen, DE
Anmeldung:11.10.17
Offenlegung:14.10.16
Patenterteilung:15.09.20

Abstract / Hauptanspruch
A coordinate measuring machine comprising a movable part, a drive and drive controller, and a position measuring system for measuring position values of the movable part. Intended values produced by the drive controller are supplied to a computational model (MOD) of a computational device. The intended values respectively predetermine an intended state of the drive. Position deviations (Δs) are formed between the measured position values (s) and position estimates of the computational model (MOD). The position estimates are produced by the computational model (MOD) for a predetermined location at the movable part. Acceleration values are measured by an acceleration sensor arranged at a location at the movable part. Acceleration deviations (Δa) are formed between the measured acceleration values (a) and acceleration estimates of the computational model (MOD). During the operation of the coordinate measuring machine, the position deviations (Δs) and the acceleration deviations (Δa) are supplied to the computational model (MOD), which outputs updated position estimates (ŝ) and updated acceleration estimates (â), accordingly. The position of the movable part is determined by the updated position estimates (ŝ).

US10775148B2


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