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Optical roughness sensor for a coordinate measuring machine

Patentnummer:US10775150B2
IPC Hauptklasse:G01B001103
Anmelder:Hexagon Technology Center GmbH (0)
Heinrich-Wild-Strasse, 9435 Heerbrugg, CH
Erfinder:JENSEN, Thomas (0)
Mühletobelstr. 31, CH-9400 Rorschach, CH
Anmeldung:25.07.18
Offenlegung:26.07.17
Patenterteilung:15.09.20

Abstract / Hauptanspruch
An optical roughness sensor for a coordinate measuring machine, comprising a beam coupling unit for coupling and decoupling optical radiation, a local reference oscillator element for providing a reference path and an interferometric reference signal by means of a reference radiation component of the radiation, a first decoupling path comprising a first beam passage window for bidirectional transmission of a measuring radiation component of the radiation such that the measuring radiation component is aligned onto an object surface to be measured and a reflection of the measuring radiation component is acquired and a surface signal is provided by the reflected measuring radiation component. The reference path and the decoupling path interact such that the reference signal and the surface signal interfere and a roughness signal is derivable.

US10775150B2


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