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Probe system for measuring at least one measurement object in optical and tactile fashion

Patentnummer:US10641602B2
IPC Hauptklasse:G01B001100
Anmelder:Carl Zeiss AG (0)
Carl Zeiss Strasse 22, 73447 Oberkochen, DE
Erfinder:Ruck, Otto (0)
73479, Ellwangen, DE
Anmeldung:11.10.18
Offenlegung:11.10.17
Patenterteilung:05.05.20

Abstract / Hauptanspruch
A probe system for measuring a measurement object in optical and tactile fashion is provided which includes a tactile sensor. The tactile sensor includes a tactile probe element. The tactile probe element has a sensor surface and is configured to probe the measurement object in a tactile fashion at at least one probing point on the sensor surface. The probe system further includes a microscope camera which includes an illumination device configured to produce an illumination light beam. The microscope camera further includes a microscope optical unit configured to focus the illumination light beam in the probing point and to produce a magnified image of the measurement object in an image plane. The microscope camera also includes an image capture device configured to record the magnified image and is at least partly arranged in the tactile probe element.

US10641602B2


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