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Method for detecting the position of a mask holder on a measuring table

Patentnummer:US10656537B2
IPC Hauptklasse:G01B001100
Anmelder:Carl Zeiss AG (0)
73447, Oberkochen, DE
Erfinder:
Anmeldung:22.10.18
Offenlegung:22.04.16
Patenterteilung:19.05.20

Abstract / Hauptanspruch
The invention relates to a method for detecting the position of a mask holder for photolithographic masks, said method including the following steps:
* positioning the mask holder with the mask on a measuring table of a measurement apparatus,
* measuring the mask holder by use of an algorithm,
* storing the absolute position of the mask holder on the measuring table, and
* recording and storing at least one reference image.

US10656537B2


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