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CHROMATIC CONFOCAL DEVICE AND METHOD FOR 2D/3D INSPECTION OF AN OBJECT SUCH AS A WAFER | CHROMATISCHE KONFOKALE VORRICHTUNG UND VERFAHREN ZUR 2D/3D-INSPEKTION EINES OBJEKTS WIE ETWA EINES WAFERS | DISPOSITIF ET PROCÉDÉ CONFOCAL CHROMATIQUE POUR L'INSPECTION 2D/3D D'UN OBJET TEL QU'UNE PLAQUETTE

Patentnummer:EP3222964B1
IPC Hauptklasse:G01B001124
Anmelder:
Erfinder:
Anmeldung:25.03.16
Offenlegung:25.03.16
Patenterteilung:15.01.20

Abstract / Hauptanspruch
The present invention concerns a confocal chromatic device for inspecting the surface of an object (10) such as a wafer, comprising a plurality of optical measurement channels (24) with collection apertures (14) arranged for collecting the light reflected by the object (10) through a chromatic lens (13) at a plurality of measurement points (15), said plurality of optical measurement channels (24) comprising optical measurement channels (24) with an intensity detector (20) for measuring a total intensity of the collected light.

The present invention concerns also a method for inspecting the surface of an object (10) such as a wafer comprising tridimensional structures (11).

EP3222964B1


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