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SHAPE MEASURING METHOD, SHAPE MEASURING APPARATUS, PROGRAM, RECORDING MEDIUM AND METHOD OF MANUFACTURING OPTICAL ELEMENT | FORMMESSVERFAHREN, FORMMESSVORRICHTUNG, PROGRAMM, AUFZEICHNUNGSMEDIUM UND VERFAHREN ZUR HERSTELLUNG EINES OPTISCHEN ELEMENTS | PROCÉDÉ ET APPAREIL DE MESURE DE FORME, PROGRAMME, SUPPORT D'ENREGISTREMENT ET PROCÉDÉ DE FABRICATION D'UN ÉLÉMENT OPTIQUE

Patentnummer:EP3056855B1
IPC Hauptklasse:G01B001124
Anmelder:
Erfinder:
Anmeldung:12.02.16
Offenlegung:16.02.15
Patenterteilung:12.06.19

Abstract / Hauptanspruch
A rotary stage is controlled to two measurement positions along a rotational direction in which an object surface is moved when detecting a wavefront of reflected light from partial regions by a detecting unit, to move the object surface. Respective placement errors in a trajectory of the object surface at the two measurement positions are measured based on wavefronts detected by the detecting unit in states in which the rotary stage is controlled to each of the two measurement positions. For the remaining measurement positions among the measurement positions, respective placement errors with respect to the trajectory of the object surface are estimated based on the placement errors measured. Before measurement of each item of partial shape data, the rotary stage is controlled to a measurement position and stages are controlled to a position that cancels a placement error at the measurement position to align the object surface.

EP3056855B1


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