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Confocal measurement device | Konfokale Messvorrichtung | Dispositif de mesure confocale

Patentnummer:EP2500685B2
IPC Hauptklasse:G01B001102
Anmelder:OMRON CORPORATION (0)
Kyoto, JP
Erfinder:Hayakawa, Masayuki (0)
c/o OMRON Corporation; 801, Minamifudodo-cho, ; Horikawahigashiiru, ; Shiokoji-dori, Shimogyo-Ku, Kyoto Kyoto 600-8530, JP
Hirata, Mariko (0)
c/o OMRON Corporation; 801, Minamifudodo-cho, ; Horikawahigashiiru, ; Shiokoji-dori, Shimogyo-Ku, Kyoto Kyoto 600-8530, JP
Anmeldung:16.02.12
Offenlegung:14.03.11
Patenterteilung:19.06.19

Abstract / Hauptanspruch
The present invention provides a confocal measurement device that measures displacements of a measurement object using a confocal optical system, suppressing variations in the precision, due to wavelength, with which displacements of the measurement object are measured. Disclosed is confocal measurement device for measuring a displacement of a measurement object using a confocal optical system. The confocal measurement device 100 includes a white LED 21, a diffraction lens 1 that introduces chromatic aberration in an optical axis direction into the light emitted by the white LED 21, an objective lens 2 that is arranged closer to the measurement object 200 than the diffraction lens 1, and that condenses the light into which chromatic aberration has been introduced by the diffraction lens 1 onto the measurement object 200, a pinhole that lets the light condensed by the objective lens 2 that is in focus on the measurement object pass, and a measurement unit that measures a wavelength of the light passed by the pinhole. A focus distance of the diffraction lens 1 is larger than a difference between a distance from the diffraction lens 1 to the objective lens 2 and a focus distance of the objective lens 2.

EP2500685B2


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