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Method of fabricating a piezoresistive device | Herstellungsverfahren für Piezowiderstandseinrichtung | Procédés de fabrication d'un dispositif piézorésistif

Patentnummer:EP1279927B1
IPC Hauptklasse:G01D000512
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Anmeldung:01.07.02
Offenlegung:03.07.01
Patenterteilung:27.02.19

Abstract / Hauptanspruch
Manufacture of piezoresistive device for measuring pressures or accelerations, involves forming layer of material for piezoresistive gauge on electric isolation layer, and forming protection mask on material layer Piezoresistive device having piezoresistive gauge(s) and an electric isolation layer, is made by forming a layer of material for the gauge on the electric isolation layer; forming a protection mask on the material layer; and in that, within areas that are not protected by the mask, etching the material or transformation of the material into an electric isolation material. Manufacture of a piezoresistive device having piezoresistive gauge(s) (29) and an electric isolation layer upon which the gauge is formed, includes forming a layer of material for the gauge on the electric isolation layer; forming a protection mask on the layer of material for the gauge; and in that, within areas that are not protected by the mask, performing an etching of the material or a transformation of the material into an electric isolation material such that after selectively removing the mask. Side tangents (T) of the formed gauge, when observing a cross-section of the device, form over 90 degrees angles with a surface (37) of the electric isolation layer upon which the gauge is formed.

Dispositif piézorésistif et procédés de fabrication de ce dispositif.

Ce dispositif, qui sert par exemple à mesurer des pressions ou des accélérations, comprend une couche isolante (32) sur laquelle est formée au moins une jauge piézorésistive (29). Les tangentes (T) aux flancs de cette jauge font essentiellement des angles supérieurs à 90° avec la surface (37) de la couche isolante. On peut former le dispositif par des procédés de gravure humide isotrope, de gravure chimique anisotrope ou de croissance d'un matériau isolant.

EP1279927B1


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