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Precision stage interferometer system with air duct | Interferometersystem mit Luftleitung für feinmechanische Trägerplatte | Système interférométrique avec manche à air pour dispositif porte-objet de précision

Patentnummer:EP2573507B1
IPC Hauptklasse:G01B0005008
Anmelder:Mitutoyo Corporation (0)
20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP
Erfinder:
Anmeldung:19.09.12
Offenlegung:20.09.11
Patenterteilung:27.02.19

Abstract / Hauptanspruch
A coordinate measuring machine 100 includes a three-dimension precision transfer equipment 200 and a measuring equipment 300 that measures an object W. The three-dimension precision transfer equipment 200 includes a movable body 31D, first to third driving bodies 41, 41', 8, first to third drive mechanisms 4, 4', 4" that drive to move the first to third driving bodies 41, 41', 8 forward and backward in a first direction, a second direction and a vertical direction that are mutually orthogonal, and first to third laser interferometers 5, 5', 5" that detect a displacement of the movable body 31D. The first to third driving bodies 41, 41', 8 include first to third joints 6D, 6D', 10 that forms a static-pressure clearance between the first to third driving bodies 41, 41', 8 and the movable body 31D. Laser paths of the first to third laser interferometers 5, 5', 5" extend in a manner to respectively penetrate the first to third driving bodies 41, 41', 8 and the first to third joints 6D, 6D', 10.

EP2573507B1


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