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Metrology system, method, and computer program product employing automatic transitioning between utilizing a library and utilizing regression for measurement processing

Patentnummer:US10190868B2
IPC Hauptklasse:G01B001102
Anmelder:KLA-Tencor Corporation (0)
One Technology Drive, Milpitas, CA 95035, US
Erfinder:
Anmeldung:13.08.15
Offenlegung:30.04.15
Patenterteilung:29.01.19

Abstract / Hauptanspruch
A metrology system, method, and computer program product that employ automatic transitioning between utilizing a library and utilizing regression for measurement processing are provided. In use, it is determined, by the metrology system, that a predetermined condition has been met. In response to determining that the predetermined condition has been met, the metrology system automatically transitions between utilizing a library and utilizing regression for measurement processing.

US10190868B2


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