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Interference objective lens unit with temperature variation compensation and light-interference measuring apparatus using thereof | Interferenzobjektivlinseneinheit und Lichtinterferenzmessungsvorrichtung damit | Unité de lentille d'objectif d'interférence et appareil de mesure d'interférence lumineuse l'utilisant

Patentnummer:EP2447663B1
IPC Hauptklasse:G01B000500
Anmelder:Mitutoyo Corporation (0)
20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP
Erfinder:Matsumiya, Sadayuki (0)
; c/o Mitutoyo Corporation, 20-1, Sakado 1-chome, ; Takatsu-ku, Kawasaki-shi, ; Kanagawa 213-0012, JP
Nagahama, Tatsuya (0)
c/o Mitutoyo Corporation; 20-1, Sakado 1-chome; Takatsu-ku, Kawasaki; Kanagawa 213-8533, JP
Usami, Atsushi (0)
c/o Mitutoyo Corporation; 20-1, Sakado 1-chome; Takatsu-ku, Kawasaki; Kanagawa 213-8533, JP
Anmeldung:25.10.11
Offenlegung:26.10.10
Patenterteilung:05.12.18

Abstract / Hauptanspruch
Disclosed is an interference objective lens unit, comprising: an objective lens (30) ; a beam splitter (21) that splits the light transmitted through the objective lens (30) into a reference optical path in which a reference mirror is provided and a measuring optical path in which the measuring object (W) is placed, and that superposes the split lights to output interference light; a first holder (34) that holds the objective lens and that is formed by material having a first linear expansion coefficient; and a second holder (35) that holds the reference mirror and that is formed by material having a second linear expansion coefficient different from the first linear expansion coefficient, wherein when a usage environment temperature changes, a difference in the linear expansion coefficients between the first holder and the second holder corrects an optical path difference between the reference optical path and the measuring optical path.

EP2447663B1


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