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OPTICAL CONFIGURATION FOR MEASUREMENT DEVICE | OPTISCHE KONFIGURATION FÜR EINE MESSVORRICHTUNG | CONFIGURATION OPTIQUE POUR DISPOSITIF DE MESURE
Patentnummer: | EP3182054B1 |
IPC Hauptklasse: | G01B001100 |
Anmelder: | Mitutoyo Corporation (0) 20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP |
Erfinder: | Sesko, David William (0) 15123 206th Avenue N.E., Woodinville WA Washington 98077, US |
Anmeldung: | 14.12.16 |
Offenlegung: | 17.12.15 |
Patenterteilung: | 05.12.18 |
Abstract / Hauptanspruch |
A scanning probe is provided for use with a coordinate measuring machine. The scanning probe includes a rotary position detection configuration which outputs X and Y position signals indicative of a rotation of a stylus coupling portion about a rotation center, and an axial position detection configuration which outputs a Z position signal indicative of the position of the stylus coupling portion along the axial direction. The Z position signal is substantially insensitive to motion of the axial detection deflector in at least one direction that is transverse to the axial direction. The X, Y and Z position signals may be processed to determine a 3D position of a contact portion of the stylus, which may include utilizing the Z position signal in combination with known trigonometry of the scanning probe to remove axial motion cross coupling components from the X and Y position signals. |
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