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OPTICAL CONFIGURATION FOR MEASUREMENT DEVICE | OPTISCHE KONFIGURATION FÜR EINE MESSVORRICHTUNG | CONFIGURATION OPTIQUE POUR DISPOSITIF DE MESURE

Patentnummer:EP3182054B1
IPC Hauptklasse:G01B001100
Anmelder:Mitutoyo Corporation (0)
20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP
Erfinder:Sesko, David William (0)
15123 206th Avenue N.E., Woodinville WA Washington 98077, US
Anmeldung:14.12.16
Offenlegung:17.12.15
Patenterteilung:05.12.18

Abstract / Hauptanspruch
A scanning probe is provided for use with a coordinate measuring machine. The scanning probe includes a rotary position detection configuration which outputs X and Y position signals indicative of a rotation of a stylus coupling portion about a rotation center, and an axial position detection configuration which outputs a Z position signal indicative of the position of the stylus coupling portion along the axial direction. The Z position signal is substantially insensitive to motion of the axial detection deflector in at least one direction that is transverse to the axial direction. The X, Y and Z position signals may be processed to determine a 3D position of a contact portion of the stylus, which may include utilizing the Z position signal in combination with known trigonometry of the scanning probe to remove axial motion cross coupling components from the X and Y position signals.

EP3182054B1


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