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DISPLACEMENT DETECTING DEVICE | VERSCHIEBUNGSERKENNUNGSVORRICHTUNG | DISPOSITIF DE DÉTECTION DE DÉPLACEMENT

Patentnummer:EP3270116B1
IPC Hauptklasse:G01D000538
Anmelder:
Erfinder:
Anmeldung:13.07.17
Offenlegung:15.07.16
Patenterteilung:05.12.18

Abstract / Hauptanspruch
The purpose of the present invention is to provide a displacement detecting device capable of decreasing a measurement error, even when a diffraction grating is inclined or displaced to a direction other than a measuring direction. The displacement detecting device 1 comprising: a light source 2 for emitting light; a polarized beam splitter 7; a diffraction grating 11; a prism unit 16A (16 to 19) for shifting light path; lenses 14 and 20 for correcting light path; and an interfered light receiving unit 22A (22 to 30). The prism unit 16A for shifting light path shifts first diffracted light to a direction vertical to the measuring direction. The lenses 14 and 20 for correcting light path is arranged on a symmetrical axis of light paths and corrects light path when the diffraction grating 11 is inclined or moved to a normal direction of a grating surface.

EP3270116B1


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