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Multiple wavelength configuration for an optical encoder readhead | Konfiguration mit mehreren Wellenlänge für einen optischen Codierlesekopf | Configuration de longueurs d'onde multiples pour une lecture de codeur optique

Patentnummer:EP2653838B1
IPC Hauptklasse:G01D000538
Anmelder:Mitutoyo Corporation (0)
20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP
Erfinder:Tobiason, Joseph Daniel (0)
18914 N.E. 186th Place, Woodinville, WA Washington, US
Anmeldung:01.03.13
Offenlegung:20.04.12
Patenterteilung:19.12.18

Abstract / Hauptanspruch
A readhead and scale arrangement 1000 comprises: a readhead 100 comprising a light source 180 configured to output diverging source light 150 comprising a plurality of individually detected wavelengths and at least a first optical signal receiver channel configured to provide a first set of position signals; and a scale track 86 extending along the measuring axis 82 direction on a scale member 81 comprising a scale grating 80, the scale track 86 configured to diffract the first diverging source light to provide first and second diffracted scale light portions of each of the individually detected wavelengths to the first optical signal receiver channel which provide interference fringes. The readhead 100 comprises an optical path difference element 365, arranged such that respective wavelengths undergo different phase shifts. Such an encoder is robust to scale track contamination and other signal degradation.

EP2653838B1


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