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Capacitive displacement sensor | Kapazitive Messsonde | Sonde de mesure capacitive

Patentnummer:EP1967826B1
IPC Hauptklasse:G01D0005241
Anmelder:
Erfinder:
Anmeldung:30.01.02
Offenlegung:30.01.01
Patenterteilung:14.11.18

Abstract / Hauptanspruch
A displacement responsive device e.g. a measurement probe 110 is disclosed. Displacement of a stylus 130 causes resilient movement of a carriage 134 supported by planar springs 112 and 114. This movement is detected by a capacitance sensor 160, formed from two substantially coaxial tubes. The tubes move in at least three degrees of freedom and changes in their capacitance during the said movement can be determined by a circuit (e.g. Fig 5). Movement in x,y and z directions can be sensed.

EP1967826B1


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