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Straightness correcting method for surface texture measuring instrument | Verfahren zum Geradheitskorrektur einer Oberflächentexturmesseinrichtung | Procédé de correction de rectitude pour un instrument de mesure de la texture d'une surface

Patentnummer:EP1696202B1
IPC Hauptklasse:G01B002104
Anmelder:Mitutoyo Corporation (0)
20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP
Erfinder:Katayama, Minoru (0)
Hiroshima, Kure, JP
Anmeldung:03.02.06
Offenlegung:28.02.05
Patenterteilung:05.09.18

Abstract / Hauptanspruch
To provide a surface texture measuring instrument that is capable of optimally performing a correction operation depending on the rotation angle position of a detector even when the detector is rotated for measurement, and a straightness correcting method therefor. Included are a correction data storage step of storing, into a correction data storage section, detector correction data for every movement position of an X-axis drive unit in relation to rotation angle positions at which a roughness detector is set to each different rotation angle positions, a measurement data acquisition step of acquiring, at measurement, as measurement data, the movement positions of the X-axis drive unit and a displacement amount of the roughness detector while driving the X-axis drive unit in the state that the roughness detector is set by a detector rotation unit to any of the rotation angle positions corresponding to the measurement surface of a measurement work, and in the state that a sensing pin is being touched on the measurement surface of the measurement work, and a correction calculation step of reading out any of the detector correction data in agreement with or in closest agreement with the rotation angle position of the roughness detector at measurement from the correction data storage section, and using the resulting detector correction data, correcting the measurement data.

EP1696202B1


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