patentverein.de - Patente
Patentethik
Überwachung
Beispielhaft
Trivial
Kurios
Unverständlich
Zurück Original-Dokument
Europäisches Patentamt

Extended range focus detection apparatus | Fokuserkennungsvorrichtung mit erweiterter Reichweite | Appareil de détection de mise au point de gamme étendue

Patentnummer:EP2202480B1
IPC Hauptklasse:G01B001106
Anmelder:Mitutoyo Corporation (0)
20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP
Erfinder:Harsila, Scott (0)
20412 - 14th Drive S.E., Bothell, WA 98012, US
Anmeldung:02.04.09
Offenlegung:29.12.08
Patenterteilung:19.09.18

Abstract / Hauptanspruch
An extended range focus sensor is provided. In various embodiments, the focus sensor may include a relay lens assembly to image a plane between an objective lens and the relay lens arrangement to a plane near an entrance pupil of a focus detector arrangement of the focus sensor. In some embodiments, the objective lens pupil is imaged onto the focus detector entrance pupil. In some embodiments, an illumination beam passes through the relay lens arrangement and is magnified on its way to be output by the objective lens, and the reflected focus detection beam passes back through the objective lens and the relay lens arrangement and is reduced prior to being input to the focus detector arrangement. In some embodiments, the focus detector arrangement may comprising a broad range focus detector combined with a high resolution Shack-Hartmann focus detector, and in others a single extended range Shack-Hartmann focus detector is used.

EP2202480B1


Kommentare zu diesem Patent schicken Sie bitte an .
Datenschutzerklärung