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DISPLACEMENT DETECTING DEVICE | VERSCHIEBUNGSERKENNUNGSVORRICHTUNG | DISPOSITIF DE DÉTECTION DE DÉPLACEMENT

Patentnummer:EP3124924B1
IPC Hauptklasse:G01D000526
Anmelder:Mitutoyo Corporation (0)
20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP
Erfinder:
Anmeldung:28.07.16
Offenlegung:28.07.15
Patenterteilung:19.09.18

Abstract / Hauptanspruch
A displacement detecting device includes a scale diffraction grating (210) and a detecting head unit (300). The detecting head unit (300) includes a light source (320), a first retroreflecting unit (350) that retroreflectes positive first-order diffracted light of light diffracted by the scale diffraction grating, such that the retroreflected light enters the scale diffraction grating again, a second retroreflecting unit (360) that retroreflectes negative first-order diffracted light of the light diffracted by the scale diffraction grating, such that the retroreflected light enters the scale diffraction grating (210) again, and a light receiving unit (380) that receives an interference signal. Each of the first retroreflecting unit (350) and the second retroreflecting unit (360) has a deflecting function of deflecting light incident on the corresponding retroreflecting unit by a predetermined angle and then emitting the light.

EP3124924B1


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