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Patentnummer:EP3141873B1
IPC Hauptklasse:G01D0005347
Anmelder:Mitutoyo Corporation (0)
20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP
Erfinder:Yaku, Toru (0)
Kanagawa, Kawasaki, JP
Anmeldung:07.09.16
Offenlegung:08.09.15
Patenterteilung:25.07.18

Abstract / Hauptanspruch
A scale (1) includes a grating pattern (4) arranged in a measurement direction. A detection head (2) can be moved relative to the scale in the measurement direction and outputs an electric signal indicating a result of detection of the pattern. An operation unit (3) calculates a relative displacement of the detection head relative to the scale. The detection head (2) irradiates the scale with light. A light-receiving unit (12) includes a light-receiving element array arranged in the measurement direction and outputs a result of detection of the irradiation light applied to the light-receiving element array as the electric signal. An optical system (11) forms light from the scale into interference fringes on a light-receiving surface of the light-receiving unit by using lens arrays arranged in the measurement direction. A lens array pitch between neighboring lenses of the lens arrays is not equal to an integral multiple of a pitch of the grating pattern.

EP3141873B1


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