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DISPLACEMENT DETECTING DEVICE | VERSCHIEBUNGSERKENNUNGSVORRICHTUNG | DISPOSITIF DE DÉTECTION DE DÉPLACEMENT

Patentnummer:EP2955490B1
IPC Hauptklasse:G01D0005347
Anmelder:
Erfinder:
Anmeldung:11.06.15
Offenlegung:11.06.14
Patenterteilung:07.03.18

Abstract / Hauptanspruch
To provide a displacement detecting device capable of achieving an improvement in a measurement range without being restricted by an origin mark or an origin signal. A displacement detecting device 1 includes a scale 2, scale marks, a displacement detecting section 9, a displacement calculation section 4, a movement detecting section 10, a movement amount calculation section 5, a comparison/calculation section 6, and an absolute position calculation section 7. The comparison/calculation section 6 differentiates, when the displacement detecting section 9 or scale 2 moves in a track direction Y1, a displacement amount calculated by the displacement calculation section 4, thereby calculating a second-order differential amount in the track direction Y1. The absolute position calculation section 7 calculates an absolute position in a measurement direction X1 with respect to the scale 2, based on the second-order differential amount calculated by the comparison/calculation section 6, and outputs the absolute position.

EP2955490B1


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