patentverein.de - Patente
Patentethik
Überwachung
Beispielhaft
Trivial
Kurios
Unverständlich
Zurück Original-Dokument
Europäisches Patentamt

Eddy current sensor | Wirbelstromsensor | Capteur à courants de Foucault

Patentnummer:EP2719995B1
IPC Hauptklasse:G01B000706
Anmelder:EBARA CORPORATION (0)
11-1, Haneda Asahi-cho, Ohta-ku, ; Tokyo 144-8510, JP
Erfinder:SUTO, Yasunari (0)
c/o Ebara Corporation; 11-1, Haneda Asahi-cho; Ohta-ku, Tokyo 144-8510, JP
TADA, Mitsuo (0)
c/o Ebara Corporation; 11-1, Haneda Asahi-cho, ; Ohta-ku, Tokyo 144-8510, JP
Anmeldung:18.10.04
Offenlegung:20.10.03
Patenterteilung:21.03.18

Abstract / Hauptanspruch
An eddy current sensor (10) has a sensor coil (100) disposed near a conductive film (6) formed on a semiconductor wafer (W) and a signal source (124) configured to supply an AC signal to the sensor coil (100) to produce an eddy current in the conductive film (6). The eddy current sensor (10) includes a detection circuit operable to detect the eddy current produced in the conductive film (6). The detection circuit is connected to the sensor coil (100). The eddy current sensor (10) also includes a housing (200) made of a material having a high magnetic permeability. The housing (200) accommodates the sensor coil (100) therein. The housing (200) is configured so that the sensor coil (100) forms a path of a magnetic flux (MF) so as to effectively produce an eddy current in the conductive film (6).

EP2719995B1


Kommentare zu diesem Patent schicken Sie bitte an .
Datenschutzerklärung