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Thickness measuring apparatus and thickness measuring method

Patentnummer:US9921051B2
IPC Hauptklasse:G01B001106
Anmelder:
Erfinder:
Anmeldung:03.07.14
Offenlegung:05.07.13
Patenterteilung:20.03.18

Abstract / Hauptanspruch
Provided are a thickness measuring apparatus and a thickness measuring method. The thickness measuring method includes irradiating a first laser beam of a first wavelength λ 1 to a transparent substrate and measuring intensity of the first laser beam transmitting through the transparent substrate; irradiating a second laser beam of a second wavelength λ2 to the transparent substrate and measuring intensity of the second laser beam transmitting through the transparent substrate; and extracting a rotation angle on a Lissajous graph using the first and second laser beams transmitting through the transparent substrate. A phase difference between adjacent rays by multiple internal reflection of the first laser beam and a phase difference between adjacent rays by multiple internal reflection of the second laser beam is maintained at π/2.

US9921051B2


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