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Surface texture measuring apparatus | Messvorrichtung für Oberflächenstrukturen | Appareil de mesure de la texture d'une surface

Patentnummer:EP2498047B1
IPC Hauptklasse:G01B0005016
Anmelder:Mitutoyo Corporation (0)
20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP
Erfinder:Nakayama, Tatsuki (0)
c/o Mitutoyo Corporation; 8-20, Hirokoshingai 6-chome; Kure-shi, Hiroshima 321-0723, JP
Anmeldung:17.02.12
Offenlegung:09.03.11
Patenterteilung:20.12.17

Abstract / Hauptanspruch
A surface texture measuring apparatus includes a stylus displacement detector (20) having a measurement arm (24) which is able to swing, a pair of styli (26A,26B) provided at a tip of the measurement arm, and a detection unit configured to detect swing amounts of the measurement arm, a stage configured to mount the subject of measurement thereon, and a relative movement mechanism configured to cause a relative movement between the detector and the stage. The apparatus includes a posture switching mechanism (60) configured to switch a posture of the measurement arm between a posture in which the measurement arm is urged in one swing direction and a posture in which the measurement arm is urged in the other swing direction, and a speed control mechanism (70) configured to control a switching speed of posture switching of the measurement arm to a preset speed when the posture of the measurement arm is switched by the posture switching mechanism.

EP2498047B1


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