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Photoelectric Encoder | Fotoelektrischer Kodierer | Codeur photoélectrique

Patentnummer:EP1795873B1
IPC Hauptklasse:G01D0005347
Anmelder:Mitutoyo Corporation (0)
20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP
Erfinder:Kiriyama, Tetsuro (0)
Mitutoyo Corp.; 20-1 Sakado 1-chome; Takatsu-ku, Kawasaki-shi; Kanagawa 213-0012, JP
Yaku, Toru (0)
Kanagawa, Kawasaki, JP
Anmeldung:04.12.06
Offenlegung:06.12.05
Patenterteilung:08.11.17

Abstract / Hauptanspruch
A three-grating type photoelectric encoder includes a second grating (20) formed on a scale and first and third gratings (22, 31) disposed on a side of a detector. A part of at least the first grating (22) is shifted in a direction of a measurement axis by P/(2n) (wherein P is a grating pitch, n is the order of a harmonic component to be removed) in order to remove a harmonic component of the nth order. This encoder can be improved with high accuracy by removing harmonic components without increasing manufacturing costs.

EP1795873B1


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