Photoelectronic encoder | Fotoelektronischer Positionsgeber | Codeur photoélectrique
|Anmelder:||NIKON CORPORATION (0)|
12-1, Yurakucho 1-chome, Chiyoda-ku; Tokyo 100-8331, JP
Abstract / Hauptanspruch
|A photoelectric encoder includes a light source (11) of an illumination light beam; a movable grating (15) which has grating lines and which is displaceable in a direction intersecting the grating lines; an index grating (13) which serves as a reference for displacement of the movable grating (15); a light-receiver (16) which receives the illumination light beam via the movable grating (15) and the index grating (13); a modulator (17) which periodically changes a light beam outgoing from the index grating (13); and a displacement detector (22, 23) which detects the displacement of the movable grating based on the illumination light beam received by the light-receiver (16). Accordingly, a signal representing the displacement of a movable body can be accurately generated even when the attitude of the grating occurs.|
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