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DISPLACEMENT DETECTING DEVICE | VERSCHIEBUNGSERKENNUNGSVORRICHTUNG | DISPOSITIF DE DÉTECTION DE DÉPLACEMENT

Patentnummer:EP2963392B1
IPC Hauptklasse:G01D000526
Anmelder:
Erfinder:Tamiya, Hideaki (0)
c/o Sony Manufacturing; Systems Corporation, ; 1-10 Kiyoku-cho, Kuki-shi, ; Saitama, JP
Anmeldung:02.07.15
Offenlegung:02.07.14
Patenterteilung:22.11.17

Abstract / Hauptanspruch
To provide a displacement detection apparatus capable of detecting a displacement in the height direction of a member to be measured, with a high precision, and also capable of performing a high-speed and stable measurement. A first light flux L1 serving as object light is caused to enter a member to be measured 5, and reflected light thereof is caused to enter again the member to be measured 5 after being diffracted by a first diffraction grating 7. Then, the second-time reflected light of the first light flux L1 by the member to be measured 5 is diffracted by a second diffraction grating 9. By diffracting the first light flux L1 by the second diffraction grating 9, a change of the optical path length caused by tilting of the member to be measured 5 is cancelled.

EP2963392B1


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