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TACTILE PROBING SYSTEM | SYSTÈME DE SONDE TACTILE | TAKTILES ABTASTSYSTEM

Patentnummer:EP3076124B1
IPC Hauptklasse:G01B000700
Anmelder:Mitutoyo Corporation (0)
20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP
Erfinder:Hidaka, Kazuhiko (0)
c/o Mitutoyo Research Center Europe B.V.; De Rijn 18, 5684 PJ Best, NL
Anmeldung:02.02.16
Offenlegung:31.03.15
Patenterteilung:11.10.17

Abstract / Hauptanspruch
A contact probe includes a stylus, a sensor, and two parallel substantially planar plates. The stylus has a contact. The sensor has a substantially planar shape and includes a fixed portion, at least three thin-walled portions each formed of a planar plate and having a strain sensor vapor-deposited thereon, and a movable portion to which the stylus is mounted and linked to the fixed portion via the thin-walled portions in at least three locations. The two parallel substantially planar plates are connected to the fixed portion on opposing sides and sandwich the movable portion so as to maintain a predetermined distance between the movable portion and the two parallel substantially planar plates and limit movement of the movable portion to a movable range. The sensor outputs a contact signal due to the strain sensors deforming in response to a measurement force from the stylus.

EP3076124B1


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