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Surface texture measuring instrument | Messinstrument für Oberflächenstrukturen | Instrument de mesure de la texture d'une surface

Patentnummer:EP2023076B1
IPC Hauptklasse:G01B000528
Anmelder:Mitutoyo Corporation (0)
20-1, Sakado 1-chome, ; Takatsu-ku, ; Kawasaki, Kanagawa 213-0012, JP
Erfinder:
Anmeldung:31.07.08
Offenlegung:03.08.07
Patenterteilung:06.09.17

Abstract / Hauptanspruch
A surface texture measuring instrument includes: a movement-estimating unit (300) for estimating a movement condition, like for instance a position of a drive mechanism based on a scanning vector command issued by a scanning vector commander (220) to calculate an estimated operation state quantity, like for instance an acceleration; and a correction-calculating unit (400) for correcting a detection value of a drive sensor in accordance with the estimated operation state quantity calculated by the movement-estimating unit (300). The movement-estimating unit (300) includes: a nominal-model setting unit (311) in which a nominal model representing signal transfer function of the scanning vector command from the issuance of the scanning vector command to a reflection on a movement position of the scanning probe is stored. The correction-calculating unit (400) includes a correction-amount calculating unit (420) that calculates a correction amount for correcting a measurement error generated on account of deformation during the drive of the drive mechanism based on the estimated operation state quantity; and a measurement data synthesizing unit (430) that synthesizes the detection value of the drive sensor and a detection sensor and the correction amount calculated by the correction-amount calculating unit (420) to acquire a measurement data.

EP2023076B1


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